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Nima Ghalichechian

  • Assistant Professor, Electrical & Computer Engr.
  • 1330 Kinnear Rd
    ElectroScience Laboratory, Room 245
    Columbus, OH 43212
  • 614-292-6895

About

Education

2007, Ph.D. in Electrical Engineering from University of Maryland, College Park

Biography

Dr. Nima Ghalichechian is an Assistant Professor at the Department of Electrical and Computer Engineering. He received his Ph.D. in Electrical Engineering in 2007 from University of Maryland, College Park where he developed electrostatic micromotors supported on microball bearings. From 2007 to 2012 he was with the Research Department of FormFactor Inc., Livermore, California as a Senior Principal Engineer. During this period, he helped to design and develop microsprings for advanced probe cards used in testing memory and SoC semiconductor devices. Dr. Ghalichechian joined The Ohio State University (OSU) as a Research Scientist in 2012. As a principal investigator, he has helped establishing several new programs at OSU sponsored by NSF, DARPA, and AFRL. From 2016-2017, he held a Research Assistant Professor position at ECE. His research interests are in the area of RF microsystems. He is currently principal investigator of the RF Microsystems Laboratory located at room 210 of the ElectroScience Lab

Research areas of interest

His research is interdisciplinary and centers around two areas of micro/nanotechnology and electromagnetics. Specifically, he conducts research on RF microsystems with focus on reconfigurable antenna arrays, millimeter-wave antennas, terahertz microsystems, sensors, novel materials, and microfabrication processes. 

Office

Room 245, ElectroScience Laboratory

Room 380, Dreese Laboratory

Honors

  • March, 2016

    Best student paper award at the International Workshop on Antenna Technology (iWAT), Hilton Cocoa Beach, FL, Feb 29- Mar 2, 2016 (Student name: Dimitris Papantonis)..

  • January, 2016

    Best student paper competition award (2nd place) at the USNC/URSI National Radio Science Meeting, Boulder, Colorado, Jan 6, 2016., Student name: Ersin Yetisir, co-advisor.

  • October, 2014

    Senior Member.

  • December, 2007

    Best Speaker Award.

  • December, 2007

    George Harhalakis Outstanding Systems Engineering Graduate Student Award.

  • December, 2006

    Graduate Research Award.

  • November, 2004

    Best Paper Award.

Journal Articles

2016

  • Sanphuang, V.; Ghalichechian, N.; Nahar, N.K.; Volakis, J.L., 2016, "Reconfigurable THz Filters Using Phase-Change Material and Integrated Heater." IEEE Transactions on Terahertz Science and Technology 6, no. 4, 583-591 - 583-591.
  • E. Yetisir, N. Ghalichechian, J. Volakis, 2016, "Ultra-wideband Array with 70° Scanning using FSS Superstrate." IEEE Transaction on Antennas and Propagation NA, no. 99, NA - NA.
  • V. Sanphuang; N. Ghalichechian; N. K. Nahar; J. L. Volakis, 2016, "Reconfigurable THz Filters Using Phase-Change Material and Integrated Heater,." IEEE Transactions on Terahertz Science and Technology 6, no. 4, 583-591 - 583-591.

2015

  • Ghalichechian,Nima; Sertel,Kubilay, 2015, "Permittivity and Loss Characterization of SU-8 Films for mmW and Terahertz Applications." IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS 14, 723-726 - 723-726.
  • Ghalichechian, N.; Sertel, K., 2015, "Permittivity and loss characterization of SU-8 films for mmW and terahertz applications." IEEE Antennas and Wireless Propagation Letters 14, 723-726 - 723-726.

2009

  • Beyaz, M.I.; McCarthy, M.; Ghalichechian, N.; Ghodssi, R., 2009, "Closed-loop control of a long-range micropositioner using integrated photodiode sensors." Sensors and Actuators, A: Physical 151, no. 2, 187-194 - 187-194.

2008

  • Beyaz,M,I; Ghalichechian,N; Ghodssi,R, 2008, "Toward an autonomous electrostatic micromotor: Integrated feedback control." MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST 483-486 - 483-486.
  • Ghalichechian,Nima; Modafe,Afireza; Beyaz,Mustafa,Ilker; Ghodssi,Reza, 2008, "Design, fabrication, and characterization of a rotary micromotor supported on microball bearings." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 17, no. 3, 632-642 - 632-642.

2007

  • Ghalichechian,N; Modafe,A; Beyaz,M,I; Ghodssi,R, 2007, "A rotary micromotor supported on microball bearings." TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2
  • Ghalichechian, N.; Modafe, A.; Lang, J.H.; Ghodssi, R., 2007, "Dynamic characterization of a linear electrostatic micromotor supported on microball bearings." Sensors and Actuators, A: Physical 136, no. 2, 496-503 - 496-503.

2006

  • Modafe,A; Ghalichechian,N; Frey,A; Lang,J,H; Ghodssi,R, 2006, "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." JOURNAL OF MICROMECHANICS AND MICROENGINEERING 16, no. 9, S182-S190 - S182-S190.

2005

  • Modafe,A; Ghalichechian,N; Frey,A; Lang,J,H; Ghodssi,R, 2005, "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 693-696 - 693-696.
  • Modafe, A.; Ghalichechian, N.; Powers, M.; Khbeis, M. et al., 2005, "Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS." Microelectronic Engineering 82, no. 2, 154-167 - 154-167.

2004

  • Ghalichechian, N.; Modafe, A.; Ghodssi, R.; Lazzeri, P. et al., 2004, "Integration of benzocyclobutene polymers and silicon micromachined structures using anisotropic wet etching." Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22, no. 5, 2439-2447 - 2439-2447.
  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R., 2004, "Electrical characterization of benzocyclobutene polymers for electric micromachines." IEEE Transactions on Device and Materials Reliability 4, no. 3, 495-508 - 495-508.

Presentations

  • "Reconfigurable Electromagnetic Interface." 2015, Presented at DARPA ACT Annual PI Review Meeting,
  • "Reconfigurable RF Microsystems Research Overview." 2015, Presented at Consortium on Electromagnetics and Radio Frequencies 5th Technical Meeting,
  • "Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings." Presented at Massachusetts Institute of Technology,
  • "Towards Reconfigurable and Low-loss Millimeter-Wave Antennas using MEMS Paraffin Micro-actuators." 2014, Presented at Consortium on Electromagnetics and Radio Frequencies 5th Technical Meeting,
  • "Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings,." 2010, Presented at Stanford University MEMS and NEMS Seminar Series,
  • "MEMS FOR RECONFIGURABLE RF MICROSYSTEMS, MICROMOTORS, AND MICROROSPRINGS." 2014, Presented at National Nanotechnology Research Center, Bilkent University,

Papers in Proceedings

2017

  • Keshtkaran, K.; Ghalichechian, N. "60 GHz Capacitively Probe-Fed Patch Arrays with Suspended Elements." in 11th European Conference on Antennas and Propagation (EUCAP). (1 2017).
  • Ghassemiparvin, B.; Shah, S.; Ghalichechian, N. "Novel Paraffin-based 100-GHz Variable Capacitors for Reconfigurable Antennas." in 11th European Conference on Antennas and Propagation (EUCAP). (1 2017).
  • Ghassemiparvin, B.; Shah, S.; Ghalichechian, N. "Novel paraffin-based 100-GHz variable capacitors for reconfigurable antennas." (5 2017).
  • Keshtkaran, K.; Ghalichechian, N. "60 GHz capacitively probe-fed patch arrays with suspended elements." (5 2017).
  • Ghassemiparvin, B.; Shah, S.; Ghalichechian, N.; IEEE, "Novel Paraffin-based 100-GHz Variable Capacitors for Reconfigurable Antennas." (1 2017).
  • Keshtkaran, K.; Ghalichechian, N.; IEEE, "60 GHz Capacitively Probe-Fed Patch Arrays with Suspended Elements." (1 2017).

2016

  • Keshtkaran, K.; Ghalichechian, N.; IEEE, "Suspended 60 GHz Phased Array Antenna With High Efficiency." (1 2016).
  • Papantonis, D.K.; Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Tunable band rejection in a tightly-coupled array using varactor diodes." (3 2016).
  • Papantonis, D.K.; Yetisir, E.; Ghalichechian, N.; Volakis, J.L. et al. "Tunable Band Rejection In A Tightly-Coupled Array Using Varactor Diodes." (1 2016).
  • E. Yetisir, N. Ghalichechian and J. L. Volakis "A Novel Array with 6:1 Bandwidth and 70° Scanning Using FSS Superstrate." in URSI National Radio Science Meeting, Boulder. (1 2016).
  • B. Ghassemiparvin and N. Ghalichechian "Permittivity and Dielectric Loss Measurement of Paraffin for mW and THz Applications." in International Workshop on Antenna Technology (iWAT), Cocoa Beach. (2 2016).
  • Papantonis, D.K.; Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Tunable Band Rejection In A Tightly-Coupled Array Using Varactor Diodes." in IEEE International Workshop on Antenna Technology (iWAT). (1 2016).
  • D. K. Papantonis, N. Ghalichechian and J. L. Volakis "Tunable Band Rejection In A Tightly-Coupled Array Using Varactor Diodes." in International Workshop on Antenna Technology (iWAT). (2 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Permittivity and Dielectric Loss Measurement of Paraffin Films for mmW and THz Applications." in IEEE International Workshop on Antenna Technology (iWAT). (1 2016).
  • Keshtkaran, K.; Ghalichechian, N. "Suspended 60 GHz Phased Array Antenna With High Efficiency." in IEEE International Workshop on Antenna Technology (iWAT). (1 2016).
  • Ghassemiparvin, B.; Ghalichechian, N.; IEEE, "Permittivity and Dielectric Loss Measurement of Paraffin Films for mmW and THz Applications." (1 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Reconfigurable millimeter-wave antennas using paraffin phase change materials." (5 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Reconfigurable Millimeter-Wave Antennas Using Paraffin Phase Change Materials." in 10th European Conference on Antennas and Propagation (EuCAP). (1 2016).
  • K. Keshtkaran and N. Ghalichechian "Suspended 60 GHz Phased Array Antenna With High Efficiency." in International Workshop on Antenna Technology (iWAT). (2 2016).
  • V. Sanphuang, N. Ghalichechian, N. Nahar, J. L. Volakis "Reconfigurable THz Array Employing Vanadium Dioxide." in URSI National Radio Science Meeting Boulder. (1 2016).
  • Ghassemiparvin, B.; Ghalichechian, N.; IEEE, "Reconfigurable Millimeter-Wave Antennas Using Paraffin Phase Change Materials." (1 2016).
  • B. Ghassemiparvin and N. Ghalichechian, "Reconfigurable Millimeter-wave Antennas using Paraffin-Based MEMS Capacitors." in European Conference on Antennas and Propagation (EuCAP), Davos. (4 2016).
  • Keshtkaran, K.; Ghalichechian, N. "Suspended 60 GHz phased array antenna with high efficiency." (3 2016).
  • Ghassemiparvin, B.; Ghalichechian, N. "Permittivity and dielectric loss measurement of paraffin films for mmW and THz applications." (3 2016).
  • Benjamin Lough, Behnam Ghassemiparvin, Nima Ghalichechian "RF Micro-Electro-Mechanical Pulmonary Artery Banding for Congenital Heart Diseases." in 38th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC). (8 2016).

2015

  • Chau, L.; Ho, J.G.; Lan, X.; Altvater, G. et al. "Optically controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." (1 2015).
  • Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Wideband & Wide Angle Scanning Array with Parasitic Superstrate." in IEEE International Symposium on Antennas and Propagation / USNC/URSI National North American Radio Science Meeting. (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "UWB Arrays With Tunable Band Rejection." in IEEE International Symposium on Antennas and Propagation / USNC/URSI National North American Radio Science Meeting. (1 2015).
  • Chau, L.; Ho, J.G.; Lan, X.; Altvater, G. et al. "Optically-controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." (1 2015).
  • Papantonis, D.K.; Novak, M.; Ghalichechian, N.; Volakis, J.L. "Low-Profile Ultra-Wideband Reconfigurable Tightly-Coupled Arrays." in 9th European Conference on Antennas and Propagation EuCAP. (1 2015).
  • Yetisir, E.; Ghalichechian, N.; Volakis, J.L.; IEEE, "Wideband & Wide Angle Scanning Array with Parasitic Superstrate." (1 2015).
  • Chau, L.; Ho, J.G.; Lan, X.; Altvater, G. et al. "Optically-controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." in Conference on Open Architecture/Open Business Model Net-Centric Systems and Defense Transformation. (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L.; IEEE, "UWB Arrays With Tunable Band Rejection." (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L.; IEEE, "Reconfigurable Ultra-wideband Array with Tunable Band Rejection across a 7:1 Bandwidth." (1 2015).
  • Papantonis, D.K.; Novak, M.; Ghalichechian, N.; Volakis, J.L. et al. "Low-Profile Ultra-Wideband Reconfigurable Tightly-Coupled Arrays." (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "Reconfigurable ultra-wideband array with tunable band rejection across a 7:1 Bandwidth." (1 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "Reconfigurable Ultra-wideband Array with Tunable Band Rejection across a 7:1 Bandwidth." in IEEE MTT-S International Microwave Symposium (IMS). (1 2015).
  • Papantonis, D.K.; Novak, M.; Ghalichechian, N.; Volakis, J.L. "Low-profile ultra-wideband reconfigurable tightly-coupled arrays." (8 2015).
  • S. Sahin, N. Ghalichechian, N. Nahar, K. Sertel "Lithographically-fabricated Ultrawideband Phased-Arrays for Agile mmW Connectivity." (7 2015).
  • Papantonis, D.K.; Ghalichechian, N.; Volakis, J.L. "UWB arrays with tunable band rejection." (10 2015).
  • D. Papantonis, N. Ghalichechian, J. Volakis "Reconfigurable Ultra-Wideband Array with Tunable Band Rejection across a 7:1 Bandwidth." in Reconfigurable Ultra-Wideband Array with Tunable Band Rejection across a 7:1 Bandwidth. (5 2015).
  • Yetisir, E., Ghalichechian, N., Volakis, J. L. "Wideband & wide angle scanning array with parasitic superstrate." in IEEE Antennas and Propagation Society, AP-S International Symposium (Digest). (1 2015).
  • Loc Chau, James G. Ho, Xing Lan, Norma Riley, Robert M. Young, Nabil El-Hinnawy, Doyle Nichols, John Volakis, and Nima Ghalichechian "Optically-controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." (3 2015).
  • E. Alwan, N. Ghalichechian, J. Volakis "Low Power Millimeter Wave Beamforming Transceiver System using On-Site Coding." (7 2015).
  • J. L. Volakis, E. A. Alwan, D. Papantonis, M. Novak, N. Ghalichechian and W. Khalil "Low Power Ultra-Wideband Digital Beamforming for UHF to Millimeter-Wave Applications." (3 2015).
  • D. Papantonis, M. Novak, N. Ghalichechian, John L. Volakis "Conformal and Reconfigurable Ultra-wide-band Arrays." (4 2015).
  • D. Papantonis, N. Ghalichechian, J. Volakis "UWB Arrays With Tunable Band Rejection." (5 2015).
  • Yetisir, E.; Ghalichechian, N.; Volakis, J.L. "Wideband & wide angle scanning array with parasitic superstrate." (10 2015).
  • Chau, L., Ho, J. G., Lan, X., Altvater, G., Young, R. M., El-Hinnawy, N., Nichols, D., Volakis, J., Ghalichechian, N. "Optically controlled GeTe phase change switch and its applications in reconfigurable antenna arrays." in Proceedings of SPIE - The International Society for Optical Engineering. (1 2015).

2014

  • V. Sanphuang, N. Ghalichechian, N. Nahar, J. Volakis "Reconfigurable THz Filters with Integrated Micro-Heater." (7 2014).
  • V. Sanphuang, N. Ghalichechian, N. Nahar, J. Volakis "Phase Change Materials for Reconfigurability in THz band." (6 2014).

2008

  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward an autonomous electrostatic micromotor: Integrated feedback control." in 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008). (1 2008).
  • N. Ghalichechian, M. McCarthy, M. I. Beyaz, and R. Ghodssi "Measurement and Modeling of Friction in Linear and Rotary Micromotors Supported on Microball Bearings." in IEEE International Conference on Micro Electro Mechanical Systems. (1 2008).
  • Ghalichechian, N.; McCarthy, M.; Beyaz, M.I.; Ghodssi, R. "Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings." (8 2008).
  • M.I. Beyaz, M. McCarthy, N. Ghalichechian, and R. Ghodssi "Photodiode Position Sensors for Integrated Feedback Control of a Long-Range Micropositioner." (10 2008).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward an autonomous electrostatic micromotor: Integrated feedback control." (8 2008).
  • Beyaz, M.I.; McCarthy, M.; Ghalichechian, N.; Ghodssi, R. "Photodiode position sensors for integrated feedback control of a long-range micropositioner." (12 2008).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R.; IEEE, "Toward an autonomous electrostatic micromotor: Integrated feedback control." (1 2008).
  • Ghalichechian, N.; McCarthy, M.; Beyaz, M.I.; Ghodssi, R. et al. "Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings." (1 2008).
  • Ghalichechian, N.; McCarthy, M.; Beyaz, M.I.; Ghodssi, R. "Measurement and modeling of friction in linear and rotary micromotors supported on microball bearings." in 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008). (1 2008).

2007

  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R.; IEEE, "Toward smart micromachines with integrated feedback control." (1 2007).
  • N. Ghalichechian, A. Modafe, M. I. Beyaz, and R. Ghodssi "A Rotary Micromotor Supported on Microball Bearings." (6 2007).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward smart micromachines with integrated feedback control." (12 2007).
  • Ghalichechian, N.; Modafe, A.; Beyaz, M.I.; Ghodssi, R. "A rotary micromotor supported on microball bearings." (12 2007).
  • M. I. Beyaz, N. Ghalichechian, and R. Ghodssi "Towards an Autonomous Electrostatic Micromotor: Integrated Feedback Control." (12 2007).
  • M. I. Beyaz, N. Ghalichechian, A. Modafe, and R. Ghodssi "Towards Feedback Control with Integrated Position Sensing in Micromachines." in AVS 54th International Symposium, Seattle. (10 2007).
  • Ghalichechian, N.; Modafe, A.; Beyaz, M.I.; Ghodssi, R. et al. "A rotary micromotor supported on microball bearings." (1 2007).
  • Ghalichechian, N.; Modafe, A.; Beyaz, M.I.; Ghodssi, R. "A rotary micromotor supported on microball bearings." in 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers. (1 2007).
  • Beyaz, M.I.; Ghalichechian, N.; Ghodssi, R. "Toward smart micromachines with integrated feedback control." in International Semiconductor Device Research Symposium. (1 2007).

2006

  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." in 5th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications. (9 2006).
  • N. Ghalichechian, A. Modafe, A. Frey, J. H. Lang, and R. Ghodssi "Dynamic Characterization of a Linear Variable-Capacitance Micromotor." (6 2006).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." (9 2006).
  • N. Ghalichechian, A. Modafe, M. I. Beyaz, C. M. Waits, and R. Ghodssi "Design and Fabrication of a Rotary, Electrostatic Micromotor Supported on Microball Bearings." (12 2006).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion." (9 2006).
  • N. Ghalichechian, A. Modafe, M. I. Beyaz, and R. Ghodssi "Chemical Mechanical Planarization of BCB Polymer Films: Effect of Cure Temperature." (11 2006).

2005

  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." (1 2005).
  • A. Modafe, N. Ghalichechian, and R. Ghodssi, "Embedded Benzocyclobutene Islands in Silicon (EBIS) Process for Fabrication of Electrostatic Microelectromechanical Devices." (3 2005).
  • Modafe, A.; Ghalichechian, N.; Ghodssi, R. "Multilevel interconnection and isolation for electrostatic MEMS using embedded benzocyclobutene in silicon process." (12 2005).
  • A. Modafe, N. Ghalichechian, A. Frey, J. H. Lang, and R. Ghodssi "Microball-Bearing-Supported Electrostatic Micromachines with Polymer Dielectric Films for Electromechanical Power Conversion." (11 2005).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." (11 2005).
  • Nima Ghalichechian, Alireza Modafe, Paolo Lazzeri, Victor Micheli, Mariano Anderle, and Reza Ghodssi "Characterization of Benzocyclobutene and Chromium-gold Film Interface for Application in Silicon Micromachining." (3 2005).
  • A. Modafe, N. Ghalichechian, and R. Ghodssi, "Multilevel Interconnection and Isolation for Electrostatic MEMS Using Embedded Benzocyclobutene in Silicon Process." (10 2005).
  • A. Modafe, N. Ghalichechian, J. H. Lang, and R. Ghodssi ""A Microball-Bearing-Supported Linear Electrostatic Micromotor with Benzocyclobutene Polymer Insulating Layers." (6 2005).
  • Modafe, A.; Ghalichechian, N.; Frey, A.; Lang, J.H. et al. "A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers." in 13th International Conference on Solid-State Sensors, Actuators and Microsystems. (1 2005).

2004

  • X. Tan, A. Modafe, R. Hergert, N. Ghalichechian, B. Shapiro, and R. Ghodssi "Vision-based Microtribological Characterization of Linear Microball Bearings." (11 2004).
  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R. "Electrical characterization of BCB for electrostatic microelectromechanical devices." in Symposium on Micro- and Nanosystems held at the 2003 MRS Fall Meeting. (1 2004).
  • Tan, X.; Modafe, A.; Hergert, R.; Ghalichechian, N. et al. "Vision-based microtribological characterization of linear microball bearings." (12 2004).
  • A. Modafe, N. Ghalichechian, and R. Ghodssi "BCB-Based Linear Micromotor Supported on Microball Bearings: Design Concepts, Characterization, and Fabrication Development." (11 2004).
  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R. "Electrical characterization of BCB for electrostatic microelectromechanical devices." (1 2004).

2003

  • A. Modafe, N. Ghalichechian, B. Kleber and R. Ghodssi "Electrical Characterization of BCB for Electrostatic Microelectromechanical Devices." (12 2003).
  • N. Ghalichechian, A. Modafe and R. Ghodssi "Integration of Silicon Anisotropic Wet Etching and BCB Processes." (11 2003).
  • Modafe, A.; Ghalichechian, N.; Kleber, B.; Ghodssi, R. "Electrical characterization of BCB for electrostatic microelectromechanical devices." (12 2003).