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Solid State Microelectronics Laboratory (5037)
Introduction to Introduction to laboratory techniques for semiconductor device fabrication including photolithography, oxidation, diffusion, chemical processes, reactive ion etching, and metallization; fabrication and measurements of visible light emitting diodes (LED) and GaN High Electron Mobility Transistor (HEMT).
Prereq or concur: 3030, and acceptance in ECE, MSE or EngPhysics major; or Grad standing in Engineering, Biological Sciences, or Math and Physical Sciences.
Units: 4 credit hours.
Electrical and Computer Eng