5037 - Solid State Microelectronics Laboratory

Introduction to laboratory techniques for semiconductor device fabrication including oxidation, chemical processes, photolithography, diffusion, and metalization; fabrication and measurements of planar diodes and transistors. Prereq or concur: 3030 (432), and acceptance in ECE, MSE or EngPhysics major; or Grad standing in Engineering, Biological Sciences, or Math and Physical Sciences. Not open to students with credit for 637.